Lithography Hotspot Detection Based on Heterogeneous Federated Learning with Local Adaptation and Feature Selection | IEEE CEDA

Paper

Lithography Hotspot Detection Based on Heterogeneous Federated Learning with Local Adaptation and Feature Selection

IEEE Transactions on Computer-Aided Design of Integrated Circuits & Systems (TCAD)

Publication Date:

November 2023

Jingyu Pan; Xuezhong Lin; Jinming Xu; Yiran Chen; Cheng Zhuo

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